Fabrication and properties of spin-coated polymer films

Spin coating is an extensively used method for fabricating highly uniform thin polymer film coatings with high reproducibility over both small and large areas. Due to many advantages, such as low cost, high uniformity, superior control and molecular and atomic order of the constituent particles, the spin coating process has been extensively studied and applied in various potential fields. Micro-electronics is the dominating field where spin coating is applied. Other prominent fields with application of spin coating include protective coatings, optics, membrane formation, anti-reflection coatings, sensors and others. This chapter deals with the fundamental aspects influencing the spin coating process and the basic theory behind it. Various fabrication methods that employ spin coating are discussed in the later part of the chapter along with the properties that the substrates gain due to the process. A comprehensive discussion on spin coating is provided here that will help to understand the basic process, the various fabrication methods and the properties and structures of the spin-coated polymers.