A layered SAW device based on ZnO/LiTaO3 for liquid media sensing applications
conference contribution
posted on 2024-11-23, 06:57 authored by D Powell, Kourosh Kalantar ZadehKourosh Kalantar Zadeh, Samuel Ippolito, Wojciech WlodarskiWojciech WlodarskiSurface Acoustic Wave (SAW) sensors comprising a zinc oxide guiding layer deposited on a 36°-YX lithium tantalate substrate were developed. They were found to have greater mass sensitivity than other LiTaO3 based SAW sensors, such as the -SiO2/LiTaO3 configuration. In this paper, the fabrication of the ZnO/LiTaO3 sensor is described and micro-characterisation of the deposited films is presented. Sensitivity of these devices to surface mass and dielectric perturbations is then presented, followed by an analysis of temperature stability.
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Start page
493End page
496Total pages
4Outlet
Proceedings of IEEE 2002 Ultrasonics SymposiumEditors
DE Yahas, SC SchneiderName of conference
Ultrasonics SymposiumPublisher
IEEEPlace published
Munich, GermanyStart date
2002-10-08End date
2002-10-11Language
EnglishCopyright
© 2002 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.Former Identifier
2002000417Esploro creation date
2020-06-22Fedora creation date
2009-09-01Open access
- Yes
