An equivalent circuit for simulating love mode acoustic wave transducers: comparison of simulation and results

A simulation was performed using the equivalent circuit previously developed for a Love mode surface acoustic wave transducer. The present model is based on the Mason equivalent circuit for inter-digital fingers. A Love mode SiO2/ST-cut quartz transducer with operating frequency at 96 MHz was fabricated and the transfer function and input impedance were measured. Simulation results were compared with the experimental measurements and they showed close agreement.