Comparison between conductometric and layered SAW hydrogen gas sensor
conference contribution
posted on 2024-10-30, 14:35 authored by Samuel Ippolito, Sasikaran Kandasamy, Kourosh Kalantar ZadehKourosh Kalantar Zadeh, Wojciech WlodarskiWojciech Wlodarski, Anthony HollandAnthony HollandA comparison between the performance of conductometric and layered surface acoustic wave (SAW) hydrogen sensors is presented. Both sensor structures employ an R.F. magnetron sputtered tungsten trioxide (WO3) thin film as a selective layer for hydrogen (H2) sensing applications. The conductometric device is based on an alumina substrate, while the layered SAW device structure is fabricated on a 36° Y-cut, X-propagating LiTaO3 substrate with a zinc oxide (ZnO) guiding layer. The sensors were investigated for different operational temperatures and various concentrations of H2 in synthetic air.
