Direct laser writing with a slit-beam dynamically controlled with a phase spatial light modulator
conference contribution
posted on 2024-10-31, 19:00authored byBenjamin Cumming, Min GuMin Gu
We present the use of a spatial light modulator operating as a phase modulator to create a dynamic slit at the pupil plane of the objective. The dynamic updating of the slit size, shape, position and angle allows for the aspect ratio improving slit method to be applied to more complex structures beyond straight waveguides and channels and to higher numerical aperture objectives that possess lateral asymmetry due to depolarization effects.
ISBN - Is published in 9781457719394 (urn:isbn:9781457719394)
Start page
1691
End page
1692
Total pages
2
Outlet
Proceedings of the International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) the 9th Pacific Rim 2011 incorporaing ACOLS and ACOF