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Direct laser writing with a slit-beam dynamically controlled with a phase spatial light modulator

conference contribution
posted on 2024-10-31, 19:00 authored by Benjamin Cumming, Min GuMin Gu
We present the use of a spatial light modulator operating as a phase modulator to create a dynamic slit at the pupil plane of the objective. The dynamic updating of the slit size, shape, position and angle allows for the aspect ratio improving slit method to be applied to more complex structures beyond straight waveguides and channels and to higher numerical aperture objectives that possess lateral asymmetry due to depolarization effects.

History

Related Materials

  1. 1.
    DOI - Is published in 10.1109/IQEC-CLEO.2011.6193977
  2. 2.
    ISBN - Is published in 9781457719394 (urn:isbn:9781457719394)

Start page

1691

End page

1692

Total pages

2

Outlet

Proceedings of the International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) the 9th Pacific Rim 2011 incorporaing ACOLS and ACOF

Editors

Ken Baldwin

Name of conference

IQEC/CLEO Pacific Rim 2011

Publisher

IEEE Photonics Society

Place published

United States

Start date

2011-08-28

End date

2011-09-01

Language

English

Copyright

© 2011 IEEE

Former Identifier

2006058035

Esploro creation date

2020-06-22

Fedora creation date

2016-01-14