Excimer laser surface micromachining of LiNbO3 for realisation of optimised optical modulator electrode structures

An investigation of the micromachining of trenches in lithium niobate (LiNbO3) using direct imaged 248 nm KrF (krypton fluoride) excimer laser photoablation is presented. High resolution trenches, 2-20 micrometers wide and 0.5-7.5 micrometers depth have been produced. These trenches are assessed and are deemed suitable for the machining of integrated optic structures with particular application in the enhancement of electrodes for broadband optical intensity modulators.