Forced Vibration of Electrically Actuated FGM Micro-Switches

This paper presents an analytical study on the forced vibration of micro-switches under combined electrostatic, intermolecular forces and axial residual stress. The micro-switch considered in this study is made of non-homogeneous functionally graded material with two material phases. The nonlinear partial differential equation which describes the forced vibration of the micro-beam is derived based on the framework of non Karman-type geometric nonlinearity and Euler-Bernoulli beam theory, and are solved using the method of averaging. The modulations of the amplitude of clamped-clamped micro-switch are obtained. The present results are validated through direct comparisons with published experimental results. Excellent agreement has been achieved. A parametric study is conducted to show the effects of material composition and AC harmonic force on the frequency response characteristics of the micro-switch.