Orientation dependence of strontium-doped lead zirconate titanate (PSZT) thin films on RF magnetron sputtering conditions

conference contribution

posted on 2024-10-30, 16:51 authored by Sharath Sriram, Madhu Bhaskaran, Anthony HollandAnthony Holland, Geoffrey Reeves

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History

Outlet

Proceedings of the Materials Research Society Volume 928 Symposium GG

Editors

Dhananjay Kumar

Name of conference

Materials Research Society Symposium

Publisher

Materials Research Society

Place published

San Francisco, USA

Language

English

Copyright

© Materials Research Society (MRS)

Former Identifier

2006001797

Esploro creation date

2020-06-22

Fedora creation date

2009-07-17

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Keywords

PSZT RF magnetron sputtering cooling rate perovskite piezoelectric

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