Piezoelectric thin film deposition: Self-assembled island structures and low temperature processing

Sriram, Sharath; Bhaskaran, Madhu; Mitchell, Arnan

Piezoelectric thin film deposition: Self-assembled island structures and low temperature processing

conference contribution

posted on 2024-10-31, 10:20 authored by Sharath SriramSharath Sriram, Madhu BhaskaranMadhu Bhaskaran, Arnan MitchellArnan Mitchell

New deposition regimes for strontinium-doped lead zirconate titanate (PSZT) piezoelectric thin films on silicon substrates are outlines in this work.

History

Start page

29

End page

30

Total pages

2

Outlet

Proceedings of the 2010 Conference on Optoelectronic and Microelectronic Materials and Devices

Editors

H. H. Tan

Name of conference

2010 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD)

Publisher

IEEE

Place published

Piscataway, New Jersey

Start date

2010-12-12

End date

2010-12-15

Language

English

Copyright

Former Identifier

2006021568

Esploro creation date

2020-06-22

Fedora creation date

2011-11-09

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Keywords

Raman scattering dielectric film island-structure lattice guiding low temperature deposition self-assembly silicide

Piezoelectric thin film deposition: Self-assembled island structures and low temperature processing

History

Start page

End page

Total pages

Outlet

Editors

Name of conference

Publisher

Place published

Start date

End date

Language

Copyright

Former Identifier

Esploro creation date

Fedora creation date

Usage metrics

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Keywords

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