Selective NO2 gas sensing characteristics of sol-gel prepared MoO3-Wo3 thin films
conference contribution
posted on 2024-11-23, 06:58 authored by Kosmas Galatsis, Yongxiang Li, Wojciech WlodarskiWojciech Wlodarski, Kourosh Kalantar ZadehKourosh Kalantar ZadehMolybdenum trioxide - tungsten trioxide -(MoO3WO3) binary metal oxide thin films have been prepared by the sol-gel process. The films were deposited using the spin coating technique onto alumina substrates with interdigital electrodes and single crystal silicon substrates for electrical and micro characterization. Scanning Electron Microscopy (SEM) showed -MoO3WO3 film morphology composed of MoO3 needle like grains and WO3 spherical grains when annealed at 450°C. The films exhibited selective gas sensing characteristics at an operating temperature of 300°C towards nitrogen dioxide (NO2).
History
Start page
359End page
362Total pages
4Outlet
Proceedings of Conference on Optoelectronic and Microelectronic Materials and DevicesEditors
L Broekman, B Usher, J RileyName of conference
Conference on Optoelectronic and Microelectronic Materials and DevicesPublisher
IEEEPlace published
New York, USAStart date
2000-12-06End date
2000-12-08Language
EnglishCopyright
© 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.Former Identifier
2002000523Esploro creation date
2020-06-22Fedora creation date
2009-08-31Open access
- Yes
