Composites of Li-Al-B-Si-O glass and β-Al2O3 for LTCC-silicon heterogeneous integration applications

Composites of Li-Al-B-Si-O (LABS) glass and β-Al 2 O 3 have been synthesized for low-temperature co-fired ceramics (LTCC) technology application. The main phase of sintered composites is Li 2 Al 2 Si 3 O 10 and β-Al 2 O 3 phase appears only when its content is higher than 35 wt%. The DC conductivities of sintered composites are all above 1 × 10 −8 S/cm at the temperature of 473 K. The activation energies of alkali ions of different composites are all between the conductivity measured perpendicular and parallel to the c-axis of Eucryptite, which proves the ionic conductance of composites is associated with the main phase of Li 2 Al 2 Si 3 O 10. The CTE of the composites increased with the increase of β-Al 2 O 3 . The CTE of 68 wt% LABS glass-32 wt% β-Al 2 O 3 is 3.15 ppm/°C (25–300 °C), which matches that of silicon (3.2 ppm/°C, 25–300 °C) well. The results indicate that the composites of Li-Al-B-Si-O glass and β-Al 2 O 3 can be a promising material for LTCC-silicon heterogeneous integration with anodic bonding technology. © 2018 Elsevier Ltd and Techna Group S.r.l.