Design parameter characterisation and experimental validation of hydrostatic actuation suitable for MEMS

Hydrostatic actuation is a novel micro hydraulic actuation principle that uses temperature-induced pressure changes in a contained fluid as the driving force. The mechanism for actuation is unique in MEMS and the mechanical/structural design has not yet been fully characterised. In this paper, characterisation was carried out by assessing analytical models from earlier researchers created in an attempt to describe the mechanics of Bourdon tubes. Finite element models were produced as a more accurate means of analysis due to the inherent complexities and geometric nonlinearities of hydrostatic actuation. To validate the analytical and finite element models, macro prototypes were developed and tested as a means of comparison of the mechanics of the proposed hydrostatic actuation.