Dynamic analysis of a dielectric elastomer-based microbeam resonator with large vibration amplitude

A non-linear vibration equation with the consideration of large amplitude, gas damping and excitation is developed to investigate the dynamic performance of a dielectric elastomer (DE)-based microbeam resonator. Approximate analytical solution for the vibration equation is obtained by applying parameterized perturbation method (PPM) and introducing a detuning variable. The analysis exhibits that active tuning of the resonant frequency of the resonator can be achieved through changing an applied electrical voltage. It is observed that increasing amplitude will increase the natural frequency while it will decrease the quality factor of the resonator. In addition, it is found that the initial pre-stretching stress and the ambient pressure can significantly alter the resonant frequency of the resonator. The analysis is envisaged to provide qualitative predictions and guidelines for design and application of DE-based micro resonators with large vibration amplitude.