Hydrogen and ozone SAW based gas sensors with RF magnetron sputtered InOx and electron beam evaporated SiNx

https://hdl.handle.net/10779/rmit.27418467

journal contribution

posted on 2024-11-01, 03:12 authored by Alexandru Fechete, A wisitsoraat, Wojciech WlodarskiWojciech Wlodarski, Kourosh Kalantar ZadehKourosh Kalantar Zadeh, Sasikaran Kandasamy, Anthony HollandAnthony Holland

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History

Related Materials

1.
ISSN - Is published in 1002185X

Journal

Journal of Rare Metal Materials and Engineering

Volume

35

Issue

1

Start page

206

End page

209

Total pages

4

Publisher

Science Press

Place published

China

Language

English

Copyright

© 2006 Northwest Institute for Nonferrous Metal Research (China)

Former Identifier

2006001861

Esploro creation date

2020-06-22

Fedora creation date

2009-11-24

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Scholarly Works

Categories

Keywords

E-Beam Evaporated SiNx H2 InOx O3 SAW gas sensors

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All rights reserved

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