Investigation of surface crystallites on C54 titanium silicide thin films using transmission electron microscopy

This paper discusses the occurrence of crystallites on the surface of low resistivity C54 titanium silicide thin films, which will influence the estimation of contact resistance in multi-layer ohmic contacts. Cross-sectional transmission electron microscopy analysis indicates the existence of a uniform thin film with crystallites on the surface at regular intervals increasing surface roughness. Jump ratio maps and hollow cone dark field imaging have shown that the crystallites have the same composition and orientation as the underlying micron-sized grains.