Microstructural characterisation of RF Magnetron Sputtered ZnO Thin Films on SiC
journal contribution
posted on 2024-10-31, 23:38 authored by Adrian Trinchi, Wojciech WlodarskiWojciech Wlodarski, S. Santucci, D CLAUDIO, M. Passacantando, C. Cantalini, B Rout, Samuel Ippolito, Kourosh Kalantar ZadehKourosh Kalantar Zadeh, G. SberveglieriThe microstructural characterization of r.f. magnetron sputtered ZnO thin films deposited on 6H-SiC is presented with a comprehensive investigation of their properties as a function of annealing temperature and film thickness. These structures, with some modifications, are utilised as Schottky diode hydrogen gas sensors and Surface Acoustic Wave (SAW) devices.
