Nanoscale electro-mechanical dynamics of nano-crystalline platinum thin films: An in situ electrical nanoindentation study

Here, we present a detailed methodology for the study of nano-electromechanical properties of thin films through in situ electrical nanoindentation. The nanomechanical properties of nano-crystalline platinum thin films have been accurately evaluated via nullifying multiple phenomena and artefacts that can introduce errors in interpreting nanoindentation experimental data. To gain quantified insights from in situ electrical measurements, an empirical equation is introduced to model the resistance imposed by the conductive probe at the nanoscale contact as a function indentation depth and load. Using the empirical model, nanoscale electrical properties of nano-crystalline platinum films are quantitatively evaluated. It is observed that the resistivity of the platinum increases subject to high contact pressure, which is also associated with substantial structural deformations around the nano-contact area.