RF magnetron sputtered perovskite-oriented PSZT thin films on gold for piezoelectric and ferroelectric transducers
journal contribution
posted on 2024-11-23, 06:47 authored by Madhu Bhaskaran, Sharath Sriram, Anthony HollandAnthony HollandConditions for depositing perovskite-oriented Pb0.92Sr0.08(Zr0.65Ti0.35) O-3 thin films on gold by RF magnetron sputtering are investigated. Deposition results were analysed by scanning electron microscopy, X-ray photoelectron spectroscopy and X-ray diffractometry. It was found that the desired perovskite phase can be obtained at a substrate temperature of 300 degrees C, much lower than the typically reported 650 degrees C for deposition on platinum.
History
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Journal
Electronics LettersVolume
42Issue
4Start page
244End page
245Total pages
2Publisher
IEEPlace published
United KingdomLanguage
EnglishCopyright
© IEE 2006. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.Former Identifier
2006001856Esploro creation date
2020-06-22Fedora creation date
2009-02-27Open access
- Yes
