Reactive ion etching of organic polymers for application in waveguide trench moulds

journal contribution

posted on 2024-11-01, 01:41 authored by Anthony HollandAnthony Holland, Patrick Leech, Geoffrey Reeves

No description available

History

Related Materials

1.
ISSN - Is published in 00222461

Journal

Journal of Materials Science

Volume

39

Issue

7

Start page

3505

End page

3508

Total pages

4

Publisher

Kluwer Academic Publishers

Place published

United States

Language

English

Copyright

© 2004 Kluwer Academic Publishers

Former Identifier

2004002216

Esploro creation date

2020-06-22

Fedora creation date

2009-02-27

Usage metrics

Scholarly Works

Categories

Materials engineering not elsewhere classified

Keywords

Optical waveguides ion beam etching polymer

Licence

All rights reserved

Exports