Thermal expansion coefficient tailoring of LAS glass-ceramic for anodic bondable low temperature co-fired ceramic application

The Li–Al–Si glass-ceramics were prepared by conventional glass-ceramic fabrication method. The influences of Na2O content on the sintering property, microstructure, and coefficient of thermal expansion were investigated. The results show that the coefficient of thermal expansion of LAS glass-ceramics can be tailored to match that of silicon by the addition of Na2O content. Na2O has a remarkable influence on the crystallinity of Li–Al–Si glass-ceramic. The coefficient of thermal expansion of Li–Al–Si glass-ceramic is thus tunable between that of glass phase and crystal phase. The Si–O bond length change in stretch vibration modes introduced by Na2O also contributes to the variation of coefficient of thermal expansion of the Li–Al–Si glass-ceramics. The coefficient of thermal expansion of the Li–Al–Si glass-ceramic with 1.5 wt% Na2O addition is about +3.34 ppm/°C at 350 °C and shows a good compatibility to that of silicon in a wide temperature range, which makes it a promising candidate for anodic bondable low temperature co-fired ceramic substrate applications.